Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.

Https

The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS

Published

Author(s)

Mika Pfluger, Regis J. Kline, Analia Fernandez Herrero, Martin Hammerschmidt, Victor Soltwisch, Michael Krumrey
Citation
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
19
Issue
1
Created January 28, 2020, Updated February 7, 2020