Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS

Published

Author(s)

Mika Pfluger, Regis J. Kline, Analia Fernandez Herrero, Martin Hammerschmidt, Victor Soltwisch, Michael Krumrey
Citation
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
19
Issue
1

Citation

Pfluger, M. , Kline, R. , Fernandez Herrero, A. , Hammerschmidt, M. , Soltwisch, V. and Krumrey, M. (2020), Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS, Journal of Micro/Nanolithography, MEMS, and MOEMS, [online], https://doi.org/10.1117/1.JMM.19.1.014001, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929069 (Accessed August 15, 2022)
Created January 27, 2020, Updated October 12, 2021