@article{812416,
  author = {Mika Pfluger and Regis Kline and Analia Fernandez Herrero and Martin Hammerschmidt and Victor Soltwisch and Michael Krumrey},
  title = {Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS},
  year = {2020},
  number = {19},
  month = {2020-01-28 00:01:00},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929069},
  doi = {https://doi.org/10.1117/1.JMM.19.1.014001},
  language = {en},
}