TY  - JOUR
AU  - Mika Pfluger
AU  - Regis Kline
AU  - Analia Fernandez Herrero
AU  - Martin Hammerschmidt
AU  - Victor Soltwisch
AU  - Michael Krumrey
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2020-01-28 00:01:00
DO  - https://doi.org/10.1117/1.JMM.19.1.014001
LA  - en
M1  - 19
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2020
TI  - Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929069
ER  -