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Extended Frequency Range Dielectric Measurements of Thin Films



F I. Mopsik


A method is described to measure the dielectric constant and loss of thin films. It employs a sample holder based on precision 50 {ohm} air line and can be used from audio frequencies to 1 GHz with a single sample. It is shown to maximize the precision available from commercial instrumentation with minimal data correction. This is confirmed by regions in which the different instruments overlap their frequency coverage.
Review of Scientific Instruments
No. 6


dielectric constant, dielectric measurements, electronics packaging, high frequency, sample holder, thin film


Mopsik, F. (2000), Extended Frequency Range Dielectric Measurements of Thin Films, Review of Scientific Instruments, [online], (Accessed July 19, 2024)


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Created June 1, 2000, Updated February 17, 2017