Hwang, H.
, Olthoff, J.
, Van Brunt, R.
, Radovanov, S.
and Kushner, M.
(1996),
Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=41
(Accessed October 6, 2024)
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Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges
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Author(s)
H. H. Hwang, , , S. B. Radovanov, Mark J. Kushner
Citation
Journal of Applied Physics
Volume
79
Issue
1
Pub Type
Journals
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Created December 31, 1995, Updated October 12, 2021