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Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges

Published

Author(s)

H. H. Hwang, James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov, Mark J. Kushner
Citation
Journal of Applied Physics
Volume
79
Issue
1

Citation

Hwang, H. , Olthoff, J. , Van Brunt, R. , Radovanov, S. and Kushner, M. (1996), Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=41 (Accessed October 25, 2021)
Created December 31, 1995, Updated October 12, 2021