TY  - JOUR
AU  - H. Hwang
AU  - James Olthoff
AU  - Richard Van Brunt
AU  - S. Radovanov
AU  - Mark Kushner
C2  - Journal of Applied Physics
DA  - 1996-01-01 00:01:00
LA  - en
M1  - 79
PB  - Journal of Applied Physics
PY  - 1996
TI  - Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=41
ER  -