@article{769001, author = {H. Hwang and James Olthoff and Richard Van Brunt and S. Radovanov and Mark Kushner}, title = {Evidence for Inelastic Processes for N3+ and N4+ from Ion Energy Distributions in He/N2 Radio Frequency Glow Discharges}, year = {1996}, number = {79}, month = {1996-01-01 00:01:00}, publisher = {Journal of Applied Physics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=41}, language = {en}, }