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Evaluation of a CMOSSOS process using process validation wafers:

Published

Author(s)

S E Suehle, L W Linholm, G M Marshall
Citation
- NBS IR 82-2514
Report Number
NBS IR 82-2514

Citation

Suehle, S. , Linholm, L. and Marshall, G. (1982), Evaluation of a CMOSSOS process using process validation wafers:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.IR.82-2514 (Accessed May 23, 2024)

Issues

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Created January 1, 1982, Updated May 19, 2023