TY  - GEN
AU  - Suehle, S E
AU  - Linholm, L W
AU  - Marshall, G M
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1982-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.82-2514
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1982
TI  - Evaluation of a CMOSSOS process using process validation wafers:
ER  -