@misc{1179796,
  author = {S E Suehle and L W Linholm and G M Marshall},
  title = {Evaluation of a CMOSSOS process using process validation wafers:},
  year = {1982},
  month = {1982-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.82-2514},
  language = {en},
}