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Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin

Published

Author(s)

P Yan, E Spiller, Eric M. Gullikson, Shannon B. Hill
Citation
Proc 25th Annual BACUS Symp on Photomask Technology
Volume
5992

Citation

Yan, P. , Spiller, E. , Gullikson, E. and Hill, S. (2005), Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin, Proc 25th Annual BACUS Symp on Photomask Technology (Accessed July 17, 2024)

Issues

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Created December 31, 2004, Updated October 12, 2021