TY  - JOUR
AU  - P Yan
AU  - E Spiller
AU  - Eric Gullikson
AU  - Shannon Hill
C2  - Proc 25th Annual BACUS Symp on Photomask Technology
DA  - 2005-01-01 00:01:00
LA  - en
M1  - 5992
PB  - Proc 25th Annual BACUS Symp on Photomask Technology
PY  - 2005
TI  - Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin
ER  -