@article{833826,
  author = {P Yan and E Spiller and Eric Gullikson and Shannon Hill},
  title = {Evaluation of alternative capping layers for EUVL mask ML blank, ed. by J.T. Weed and P.M. Martin},
  year = {2005},
  number = {5992},
  month = {2005-01-01 00:01:00},
  publisher = {Proc 25th Annual BACUS Symp on Photomask Technology},
  language = {en},
}