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Electron-Excited Energy Dispersive X-ray Spectrometry in the Variable Pressure Scanning Electron Microscope (EDS/VPSEM): It’s Not Microanalysis Anymore!

Author(s)

Dale E. Newbury, Nicholas W. Ritchie

Abstract

X-ray spectra measured in the variable-pressure scanning electron microscope (VPSEM, chamber pressure 1 to 2500 Pa) suffer significantly degraded spatial resolution compared to high-vacuum SEM (operating pressure 0.1 mass fraction), minor (0.01≤ C ≤ 0.1), and trace (C
Citation
Proceedings of SPIE

Keywords

scanning electron microscopy, energy dispersive x-ray spectrometry, variable pressure scanning electron microscopy, electron-excited x-ray microanalysis

Citation

Newbury, D. and Ritchie, N. (1970), Electron-Excited Energy Dispersive X-ray Spectrometry in the Variable Pressure Scanning Electron Microscope (EDS/VPSEM): It’s Not Microanalysis Anymore!, Proceedings of SPIE (Accessed April 20, 2024)
Created May 7, 2017, Updated February 19, 2017