@article{article,
  author = {Dale Newbury and Nicholas Ritchie},
  title = {Electron-Excited Energy Dispersive X-ray Spectrometry in the Variable Pressure Scanning Electron Microscope (EDS/VPSEM): It\&$\#$146;s Not Microanalysis Anymore!},
  year = {1970},
  publisher = {Proceedings of SPIE},
  language = {en},
}