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Electrical Test Structures Replicated in Silicon-on-Insulator Material

Published

Author(s)

Michael W. Cresswell, J. J. Sniegowski, Rathindra Ghoshtagore, Richard A. Allen, Loren W. Linholm, John S. Villarrubia
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X
Volume
2725
Conference Dates
March 11-13, 1996
Conference Location
Bellingham, WA, USA

Citation

Cresswell, M. , Sniegowski, J. , Ghoshtagore, R. , Allen, R. , Linholm, L. and Villarrubia, J. (1996), Electrical Test Structures Replicated in Silicon-on-Insulator Material, Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X, Bellingham, WA, USA (Accessed March 4, 2024)
Created December 30, 1996, Updated October 12, 2021