TY - CONF AU - Michael Cresswell AU - J. Sniegowski AU - Rathindra Ghoshtagore AU - Richard Allen AU - Loren Linholm AU - John Villarrubia C2 - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X, Bellingham, WA, USA DA - 1996-12-31 00:12:00 LA - en M1 - 2725 PB - Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X, Bellingham, WA, USA PY - 1996 TI - Electrical Test Structures Replicated in Silicon-on-Insulator Material ER -