@conference{794611,
  author = {Michael Cresswell and J. Sniegowski and Rathindra Ghoshtagore and Richard Allen and Loren Linholm and John Villarrubia},
  title = {Electrical Test Structures Replicated in Silicon-on-Insulator Material},
  year = {1996},
  number = {2725},
  month = {1996-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), The International Society for Optical Engineering, Microlithography Metrology, Inspection and Process Control for Microlithography X, Bellingham, WA, USA},
  language = {en},
}