Cresswell, M.
, Sniegowski, J.
, Ghoshtagore, R.
, Allen, R.
, Linholm, L.
and Villarrubia, J.
(1996),
Electrical Test Structures Replicated in Silicon-On-Insulator Material, Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography X, Susan K. Jones, Editor, Santa Clara, CA, USA
(Accessed November 6, 2024)