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Electrical Scanning Probe Microscopes to Address Industrial Nano-Metrology Needs of Integrated Circuits and Nanoelectronic Devices

Published

Author(s)

Joseph J. Kopanski

Abstract

— Electrical modes of scanning probe microscopes have found considerable metrology applications in integrated circuits and emerging nano-electronic devices. This paper will review the critical metrology needs that electrical SPMs have addressed in the integrated circuit industry and further applications for the characterization of nano-electronic devices. Solutions to metrology problems addressed by electrical SPM modes including the scanning capacitance microscope (SCM), scanning Kelvin force microscope (SKFM), scanning microwave microscope (SMM), scanning spreading resistance microscope (SSRM), conductive-AFM (c-AFM), and magnetic force microscopy (MFM) will be reviewed.
Proceedings Title
CPEM 2014 Digest
Conference Dates
August 24-29, 2014
Conference Location
Rio de Janeiro
Conference Title
Conference on Precision Electromagnetic Measurements 2014

Keywords

Metrology, scanning probe microscopy, semiconductor device doping, semiconductor-insulator interfaces, semiconductor-metal interfaces, three-dimensional integrated circuits, III-V semiconductor materials, through silicon vias

Citation

Kopanski, J. (2014), Electrical Scanning Probe Microscopes to Address Industrial Nano-Metrology Needs of Integrated Circuits and Nanoelectronic Devices, CPEM 2014 Digest, Rio de Janeiro, -1, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915485 (Accessed June 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 25, 2014, Updated February 19, 2017