@conference{11056,
  author = {Joseph Kopanski},
  title = {Electrical Scanning Probe Microscopes to Address Industrial Nano-Metrology Needs of Integrated Circuits and Nanoelectronic Devices},
  year = {2014},
  month = {2014-08-25},
  publisher = {CPEM 2014 Digest, Rio de Janeiro, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915485},
  language = {en},
}