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An Electrical Method for Determining the Thickness of Metal Films and the Cross-Sectional Area of Metal Lines

Published

Author(s)

Harry A. Schafft, Santos D. Mayo, Samuel N. Jones, John S. Suehle
Proceedings Title
1994 IEEE International Integrated Reliability Workshop Final Report
Conference Dates
October 16-19, 1994
Conference Location
Lake Tahoe, CA, USA

Citation

Schafft, H. , Mayo, S. , Jones, S. and Suehle, J. (1995), An Electrical Method for Determining the Thickness of Metal Films and the Cross-Sectional Area of Metal Lines, 1994 IEEE International Integrated Reliability Workshop Final Report, Lake Tahoe, CA, USA (Accessed June 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 30, 1995, Updated October 12, 2021