TY  - CONF
AU  - Schafft, Harry
AU  - Mayo, Santos
AU  - Jones, Samuel
AU  - Suehle, John
C2  - 1994 IEEE International Integrated Reliability Workshop Final Report, Lake Tahoe, CA, USA
DA  - 1995-12-31 00:12:00
LA  - en
PB  - 1994 IEEE International Integrated Reliability Workshop Final Report, Lake Tahoe, CA, USA
PY  - 1995
TI  - An Electrical Method for Determining the Thickness of Metal Films and the Cross-Sectional Area of Metal Lines
ER  -