@conference{767506,
  author = {Harry Schafft and Santos Mayo and Samuel Jones and John Suehle},
  title = {An Electrical Method for Determining the Thickness of Metal Films and the Cross-Sectional Area of Metal Lines},
  year = {1995},
  month = {1995-12-31 00:12:00},
  publisher = {1994 IEEE International Integrated Reliability Workshop Final Report, Lake Tahoe, CA, USA},
  language = {en},
}