Cresswell, M.
, Bonevich, J.
, Allen, R.
, Guillaume, N.
, Giannuzzi, L.
, Everist, S.
, Murabito, C.
, Shea, P.
and Linholm, L.
(2001),
Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards, IEEE Transactions on Semiconductor Manufacturing
(Accessed April 29, 2024)
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Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards
Published
Author(s)
, , , , Lucille A. Giannuzzi, Sarah C. Everist, , Patrick J. Shea,
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
14
Issue
4
Pub Type
Journals
Citation
Created October 31, 2001, Updated October 12, 2021