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Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards

Published

Author(s)

Michael W. Cresswell, John E. Bonevich, Richard A. Allen, Nadine Guillaume, Lucille A. Giannuzzi, Sarah C. Everist, Christine E. Murabito, Patrick J. Shea, Loren W. Linholm
Citation
IEEE Transactions on Semiconductor Manufacturing
Volume
14
Issue
4

Citation

Cresswell, M. , Bonevich, J. , Allen, R. , Guillaume, N. , Giannuzzi, L. , Everist, S. , Murabito, C. , Shea, P. and Linholm, L. (2001), Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards, IEEE Transactions on Semiconductor Manufacturing (Accessed April 21, 2024)
Created October 31, 2001, Updated October 12, 2021