TY  - JOUR
AU  - Michael Cresswell
AU  - John Bonevich
AU  - Richard Allen
AU  - Nadine Guillaume
AU  - Lucille Giannuzzi
AU  - Sarah Everist
AU  - Christine Murabito
AU  - Patrick Shea
AU  - Loren Linholm
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2001-11-01 00:11:00
LA  - en
M1  - 14
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2001
TI  - Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards
ER  -