@article{847691,
  author = {Michael Cresswell and John Bonevich and Richard Allen and Nadine Guillaume and Lucille Giannuzzi and Sarah Everist and Christine Murabito and Patrick Shea and Loren Linholm},
  title = {Electrical Linewidth Test Structures Patterned in (100) Silicon-on-Insulator for Use as CD Standards},
  year = {2001},
  number = {14},
  month = {2001-11-01 00:11:00},
  publisher = {IEEE Transactions on Semiconductor Manufacturing},
  language = {en},
}