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Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides

Published

Author(s)

Joseph Kopanski, Donald B. Novotny
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
October 15-20, 1989
Conference Location
Hollywood, FL, USA

Citation

Kopanski, J. and Novotny, D. (1989), Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides, Extended Abstracts of the Electrochemical Society, Hollywood, FL, USA (Accessed June 18, 2024)

Issues

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Created December 30, 1989, Updated October 12, 2021