@conference{767306,
  author = {Joseph Kopanski and Donald Novotny},
  title = {Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides},
  year = {1989},
  month = {1989-12-31 00:12:00},
  publisher = {Extended Abstracts of the Electrochemical Society, Hollywood, FL, USA},
  language = {en},
}