TY  - CONF
AU  - Joseph Kopanski
AU  - Donald Novotny
C2  - Extended Abstracts of the Electrochemical Society, Hollywood, FL, USA
DA  - 1989-12-31 00:12:00
LA  - en
PB  - Extended Abstracts of the Electrochemical Society, Hollywood, FL, USA
PY  - 1989
TI  - Electrical Characterization of Beta Silicon Carbide MIS Capacitors with Thermally Grown or Chemical-Vapor-Deposited Oxides
ER  -