Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas

Published

Author(s)

M Edamura, Eric C. Benck
Citation
Journal of Vacuum Science and Technology A
Volume
22

Citation

Edamura, M. and Benck, E. (2004), Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas, Journal of Vacuum Science and Technology A (Accessed May 26, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2003, Updated October 12, 2021