Edamura, M.
and Benck, E.
(2004),
Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas, Journal of Vacuum Science and Technology A
(Accessed September 10, 2024)
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Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas
Published
Author(s)
M Edamura,
Citation
Journal of Vacuum Science and Technology A
Volume
22
Pub Type
Journals
Citation
Issues
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Created December 31, 2003, Updated October 12, 2021