TY  - JOUR
AU  - M Edamura
AU  - Eric Benck
C2  - Journal of Vacuum Science and Technology A
DA  - 2004-01-01 00:01:00
LA  - en
M1  - 22
PB  - Journal of Vacuum Science and Technology A
PY  - 2004
TI  - Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas
ER  -