@article{814091,
  author = {M Edamura and Eric Benck},
  title = {Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas},
  year = {2004},
  number = {22},
  month = {2004-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}