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PUBLICATIONS

Effect of Thermal Ramping Conditions on Defect Formation in Oxygen Implanted Silicon-on-Insulator Material

Published

Author(s)

S. J. Krause, J Park, J. H. Lee, M. K. El-Ghor, Peter Roitman
Proceedings Title
Proc., IEEE International SOI Conference
Conference Dates
October 6-8, 1992
Conference Location
Ponte Vedra Beach, FL, USA
Pub Type
Conferences

Citation

Krause, S. , Park, J. , Lee, J. , El-Ghor, M. and Roitman, P. (1992), Effect of Thermal Ramping Conditions on Defect Formation in Oxygen Implanted Silicon-on-Insulator Material, Proc., IEEE International SOI Conference, Ponte Vedra Beach, FL, USA (Accessed October 21, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1992, Updated October 12, 2021
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