Krause, S.
, Park, J.
, Lee, J.
, El-Ghor, M.
and Roitman, P.
(1992),
Effect of Thermal Ramping Conditions on Defect Formation in Oxygen Implanted Silicon-on-Insulator Material, Proc., IEEE International SOI Conference, Ponte Vedra Beach, FL, USA
(Accessed April 29, 2024)
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Effect of Thermal Ramping Conditions on Defect Formation in Oxygen Implanted Silicon-on-Insulator Material
Published
Author(s)
S. J. Krause, J Park, J. H. Lee, M. K. El-Ghor,
Proceedings Title
Proc., IEEE International SOI Conference
Conference Dates
October 6-8, 1992
Conference Location
Ponte Vedra Beach, FL, USA
Pub Type
Conferences
Citation
Created December 30, 1992, Updated October 12, 2021