TY  - CONF
AU  - S. Krause
AU  - J Park
AU  - J. Lee
AU  - M. El-Ghor
AU  - Peter Roitman
C2  - Proc.,  IEEE International SOI Conference, Ponte Vedra Beach, FL, USA
DA  - 1992-12-31 00:12:00
LA  - en
PB  - Proc.,  IEEE International SOI Conference, Ponte Vedra Beach, FL, USA
PY  - 1992
TI  - Effect of Thermal Ramping Conditions on Defect Formation in Oxygen Implanted Silicon-on-Insulator Material
ER  -