@conference{765831,
  author = {S. Krause and J Park and J. Lee and M. El-Ghor and Peter Roitman},
  title = {Effect of Thermal Ramping Conditions on Defect Formation in Oxygen Implanted Silicon-on-Insulator Material},
  year = {1992},
  month = {1992-12-31 00:12:00},
  publisher = {Proc.,  IEEE International SOI Conference, Ponte Vedra Beach, FL, USA},
  language = {en},
}