Lee, J.
, Park, J.
, Krause, S.
, Roitman, P.
and El-Ghor, M.
(1992),
Effect of Intermediate Thermal Processing on Microstructural Changes of Oxygen Implanted Silicon-on-Insulator Material, Proc., 1991 Materials Research Society Symposium, Boston, MA, USA
(Accessed April 26, 2024)
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Effect of Intermediate Thermal Processing on Microstructural Changes of Oxygen Implanted Silicon-on-Insulator Material
Published
Author(s)
J. H. Lee, J Park, S. J. Krause, , M. K. El-Ghor
Proceedings Title
Proc., 1991 Materials Research Society Symposium
Volume
235
Conference Dates
December 2-6, 1991
Conference Location
Boston, MA, USA
Pub Type
Conferences
Citation
Created December 30, 1992, Updated October 12, 2021