TY - CONF AU - J. Lee AU - J Park AU - S. Krause AU - Peter Roitman AU - M. El-Ghor C2 - Proc., 1991 Materials Research Society Symposium, Boston, MA, USA DA - 1992-12-31 00:12:00 LA - en M1 - 235 PB - Proc., 1991 Materials Research Society Symposium, Boston, MA, USA PY - 1992 TI - Effect of Intermediate Thermal Processing on Microstructural Changes of Oxygen Implanted Silicon-on-Insulator Material ER -