@conference{767426,
  author = {J. Lee and J Park and S. Krause and Peter Roitman and M. El-Ghor},
  title = {Effect of Intermediate Thermal Processing on Microstructural Changes of Oxygen Implanted Silicon-on-Insulator Material},
  year = {1992},
  number = {235},
  month = {1992-12-31 00:12:00},
  publisher = {Proc., 1991 Materials Research Society Symposium, Boston, MA, USA},
  language = {en},
}