Olthoff, J.
, Van Brunt, R.
and Radovanov, S.
(1995),
Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21683
(Accessed December 9, 2024)
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Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges
Published
Author(s)
, , S. B. Radovanov
Citation
Applied Physics Letters
Volume
67
Issue
4
Pub Type
Journals
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Created June 30, 1995, Updated October 12, 2021