@article{777371,
  author = {James Olthoff and Richard Van Brunt and S. Radovanov},
  title = {Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges},
  year = {1995},
  number = {67},
  month = {1995-07-01 00:07:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21683},
  language = {en},
}