TY  - JOUR
AU  - James Olthoff
AU  - Richard Van Brunt
AU  - S. Radovanov
C2  - Applied Physics Letters
DA  - 1995-07-01 00:07:00
LA  - en
M1  - 67
PB  - Applied Physics Letters
PY  - 1995
TI  - Effect of Electrode Material on Measured Ion Energy Distributions in Radio-Frequency Discharges
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=21683
ER  -