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Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material

Published

Author(s)

S. J. Krause, S. Visitserngtrakul, B. F. Cordts, Peter Roitman
Proceedings Title
Proc., 1989 IEEE SOS/SOI Technology Conference
Conference Dates
October 3-5, 1989
Conference Location
Stateline, NV, USA

Citation

Krause, S. , Visitserngtrakul, S. , Cordts, B. and Roitman, P. (1989), Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material, Proc., 1989 IEEE SOS/SOI Technology Conference, Stateline, NV, USA (Accessed April 16, 2024)
Created December 30, 1989, Updated October 12, 2021