Krause, S.
, Visitserngtrakul, S.
, Cordts, B.
and Roitman, P.
(1989),
Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material, Proc., 1989 IEEE SOS/SOI Technology Conference, Stateline, NV, USA
(Accessed July 27, 2024)
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Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material
Published
Author(s)
S. J. Krause, S. Visitserngtrakul, B. F. Cordts,
Proceedings Title
Proc., 1989 IEEE SOS/SOI Technology Conference
Conference Dates
October 3-5, 1989
Conference Location
Stateline, NV, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1989, Updated October 12, 2021