TY  - CONF
AU  - Krause, S.
AU  - Visitserngtrakul, S.
AU  - Cordts, B.
AU  - Roitman, Peter
C2  - Proc.,  1989 IEEE SOS/SOI Technology Conference, Stateline, NV, USA
DA  - 1989-12-31 00:12:00
LA  - en
PB  - Proc.,  1989 IEEE SOS/SOI Technology Conference, Stateline, NV, USA
PY  - 1989
TI  - Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material
ER  -