@conference{776696,
  author = {S. Krause and S. Visitserngtrakul and B. Cordts and Peter Roitman},
  title = {Effect of Annealing Conditions on Precipitate and Defect Evolution in Oxygen Implanted SOI Material},
  year = {1989},
  month = {1989-12-31 00:12:00},
  publisher = {Proc.,  1989 IEEE SOS/SOI Technology Conference, Stateline, NV, USA},
  language = {en},
}