Development of a Spectral Database for Testing Quantitataive Electron Probe Microanalysis of Rough, Bulk Samples
Dale E. Newbury
Surface roughness can substantially modify the generation and escape of x-rays from a target under electron bombardment. The ideal specimen for electron probe x-ray microanalysis is carefully prepared to eliminate surface roughness, but many practical applications require that surfaces be analyzed in the as-received condition, including possible artifacts from roughness. A database is being developed of energy dispersive x-ray spectra from microhomogeneous standards with controlled roughness to address the problem of testing various correction procedures, such as the peak-to-background method. Examples of the standards and surface treatments will be described, as well as a preliminary examination of the intensity data to assess the severity of roughness effects.
Microscopy and Microanalysis
electron probe x-ray microanalysis, energy dispersive x-ray spectrometry, microanalysis, quantitative x-ray analysis
Development of a Spectral Database for Testing Quantitataive Electron Probe Microanalysis of Rough, Bulk Samples, Microscopy and Microanalysis
(Accessed May 28, 2023)