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Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology

Published

Author(s)

Michael T. Postek, William J. Keery, Nolan V. Frederick
Proceedings Title
Proc., Scanning 90
Conference Location
Mahwah, NJ, USA

Citation

Postek, M. , Keery, W. and Frederick, N. (1990), Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology, Proc., Scanning 90, Mahwah, NJ, USA (Accessed June 25, 2024)

Issues

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Created December 30, 1990, Updated October 12, 2021