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Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology
Published
Author(s)
Michael T. Postek, William J. Keery, Nolan V. Frederick
Proceedings Title
Proc., Scanning 90
Conference Location
Mahwah, NJ, USA
Pub Type
Conferences
Citation
Postek, M.
, Keery, W.
and Frederick, N.
(1990),
Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology, Proc., Scanning 90, Mahwah, NJ, USA
(Accessed October 22, 2025)