@conference{766001,
  author = {Michael Postek and William Keery and Nolan Frederick},
  title = {Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology},
  year = {1990},
  month = {1990-12-31 00:12:00},
  publisher = {Proc., Scanning 90, Mahwah, NJ, USA},
  language = {en},
}