TY  - CONF
AU  - Michael Postek
AU  - William Keery
AU  - Nolan Frederick
C2  - Proc., Scanning 90, Mahwah, NJ, USA
DA  - 1990-12-31 00:12:00
LA  - en
PB  - Proc., Scanning 90, Mahwah, NJ, USA
PY  - 1990
TI  - Development of a Low-Profile High-Efficiency Microchannel-Plate Detector System for SEM Imaging and Metrology
ER  -