Gaitan, M.
, Parameswaran, A.
, Zaghloul, M.
, Cassard, J.
, Novotny, D.
and Suehle, J.
(1992),
Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS, Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA
(Accessed December 3, 2024)