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Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS

Published

Author(s)

Michael Gaitan, A. Parameswaran, Mona E. Zaghloul, Janet M. Cassard, Donald B. Novotny, John S. Suehle
Proceedings Title
Proc., 35th Midwest Symposium on Circuits and Systems
Conference Dates
August 9-12, 1992
Conference Location
Washington, DC, USA

Citation

Gaitan, M. , Parameswaran, A. , Zaghloul, M. , Cassard, J. , Novotny, D. and Suehle, J. (1992), Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS, Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA (Accessed April 21, 2024)
Created December 30, 1992, Updated October 12, 2021