Gaitan, M.
, Parameswaran, A.
, Zaghloul, M.
, Cassard, J.
, Novotny, D.
and Suehle, J.
(1992),
Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS, Proc., 35th Midwest Symposium on Circuits and Systems, Washington, DC, USA
(Accessed October 11, 2025)
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Design Methodology for Micromechanical Systems at Commercial CMOS Foundries Through MOSIS
Published
Author(s)
, A. Parameswaran, , , Donald B. Novotny,
Proceedings Title
Proc., 35th Midwest Symposium on Circuits and Systems
Conference Dates
August 9-12, 1992
Conference Location
Washington, DC, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created December 30, 1992, Updated October 12, 2021